THIN METAL OXIDE FILM AND PROCESS FOR PRODUCING THE SAME,申请号KR20047004818-传众专利搜索

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发明名称	THIN METAL OXIDE FILM AND PROCESS FOR PRODUCING THE SAME
摘要
申请公布号	KR20040071679(A)	申请公布日期	2004.08.12
申请号	KR20047004818	申请日期	2002.09.30
申请人		发明人
分类号	C23C8/36;C01B13/14;C23C8/02;C23C14/08;C23C14/58;C23C18/14;C23C26/00;H01L21/314;H01L21/316;H01L31/0224;H01L31/18	主分类号	C23C8/36
代理机构		代理人
主权项
地址

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