| 摘要 |
PROBLEM TO BE SOLVED: To correct a measurement result of actual measurement which does not completely agree with a reference measurement device similarly to the measurement result of the reference measurement device. SOLUTION: The impedance of data acquisition sample 11B for correction is measured with a reference measurement device 1 and an actual measurement device 2, respectively, and a correlation between the measurement result by the actual measurement device 2 and the measurement result by the reference measurement device 1 is obtained. By calculating the impedance of a measuring object electric component 11A measured with the actual measurement device 2 by substituting in the correlation, the impedance of the measuring object electric component 11A is corrected to an impedance estimated when measured with the reference measurement device 1. COPYRIGHT: (C)2004,JPO&NCIPI
|
