发明名称 ELECTROLESS PLATING SOLUTION AND PROCESS
摘要 <p>Electroless plating solutions are disclosed for forming metal alloys, such as cobalt-tungsten alloys. In accordance with the present invention, the electroless plating solutions may be formulated so as not to contain any alkali metals. Further, the solutions can be formulated without the use of tetramethylammonium hydroxide. In a further embodiment, a plating solution can be formulated that does not require the use of a catalyst, such as a palladium catalyst prior to depositing the metal alloy on a substrate.</p>
申请公布号 WO2004067192(A1) 申请公布日期 2004.08.12
申请号 WO2003US29104 申请日期 2003.09.16
申请人 MATTSON TECHNOLOGY, INC. 发明人 KONG, BOB;LI, NANHAI
分类号 C23C18/16;C23C18/50;H01L21/288;(IPC1-7):B05D5/12;C23C20/00;B05D3/10;B05D1/18 主分类号 C23C18/16
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