| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device based on an improved measuring technique, concerning the shape measuring device for measuring a three-dimensional shape. SOLUTION: A pattern projector 14 projects a brightness pattern containing a high brightness part and a low brightness part on the object 12 surface. A CCD camera 10 images a plurality of surface images of the object 12 where the brightness pattern is projected on different lens positions. A shape measuring processing part 24 extracts the image having the maximum difference of the brightness value corresponding to the high brightness part and the low brightness part of the brightness pattern from the plurality of images imaged by the CCD camera 10. The shape measuring processing part 24 determines that the extracted image is a focus coincident image, and calculates the height of the object 12 based on the lens 18 position when the focus coincident image is acquired, thereby measuring the three-dimensional shape of the object 12. COPYRIGHT: (C)2004,JPO&NCIPI
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