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发明名称
ORIENTED PIEZOELECTRIC FILM
摘要
A piezoelectric device can be prepared by placing an acicular seed crystal on a substrate, orienting the seed crystal on the substrate, and growing a piezoelectric film from the acicular seed crystal.
申请公布号
EP1444389(A2)
申请公布日期
2004.08.11
申请号
EP20020784435
申请日期
2002.11.13
申请人
SPECTRA, INC.
发明人
HOISINGTON, PAUL, A.
分类号
H01L41/22;B28B1/30;B41J2/045;B41J2/055;B41J2/16;C30B5/00;H01L41/09;H01L41/187;H01L41/24;H02N2/04;(IPC1-7):B41J2/045
主分类号
H01L41/22
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代理人
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