发明名称 |
APPARATUS FOR FIXING CHEMICAL DISPENSER |
摘要 |
PURPOSE: An apparatus for fixing a chemical dispenser is provided to stably fix a chemical dispenser regardless of the experience of an operator by coupling/separating a holder composed of upper and lower structures and by attaching/detaching the chemical dispenser to/from a space between the upper and lower structures. CONSTITUTION: The lower structure(102) has a chemical supply line(108) from which chemical is supplied. The upper structure(110) is disposed over the lower structure. An interval control unit controls the interval between the upper and lower structures to couple/separate the upper and lower structures. In coupling the upper and lower structure, the chemical dispenser(112) is fixed to a space between the upper and lower structures while the chemical dispenser is connected to the chemical supply line.
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申请公布号 |
KR20040070809(A) |
申请公布日期 |
2004.08.11 |
申请号 |
KR20030006998 |
申请日期 |
2003.02.04 |
申请人 |
ANAM SEMICONDUCTOR., LTD. |
发明人 |
HAN, GYEONG SU |
分类号 |
H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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