发明名称 APPARATUS FOR FIXING CHEMICAL DISPENSER
摘要 PURPOSE: An apparatus for fixing a chemical dispenser is provided to stably fix a chemical dispenser regardless of the experience of an operator by coupling/separating a holder composed of upper and lower structures and by attaching/detaching the chemical dispenser to/from a space between the upper and lower structures. CONSTITUTION: The lower structure(102) has a chemical supply line(108) from which chemical is supplied. The upper structure(110) is disposed over the lower structure. An interval control unit controls the interval between the upper and lower structures to couple/separate the upper and lower structures. In coupling the upper and lower structure, the chemical dispenser(112) is fixed to a space between the upper and lower structures while the chemical dispenser is connected to the chemical supply line.
申请公布号 KR20040070809(A) 申请公布日期 2004.08.11
申请号 KR20030006998 申请日期 2003.02.04
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 HAN, GYEONG SU
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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