SPIN RINSE DRY APPARATUS

摘要

PURPOSE: A spin rinse dry apparatus is provided to prevent contamination due to dispersed chemicals by shielding the dispersed chemicals from a wafer. CONSTITUTION: A plurality of safety covers(150) are installed at an upper side of a main body(110) in order to shield or open the upper side of the main body. A plurality of elastic members(160) are installed at the safety covers in order to maintain a shielding state of the safety covers and shield chemicals from a wafer by providing the elastic force to the safety covers. A cover driving motor(180) is installed at one side of the main body and is connected to upper sides of the safety covers in order to open the covers by using a pulling wire(170) and a rotary shaft(181).