| 摘要 |
PURPOSE: A shadow mask, a method for manufacturing the same, and a method for manufacturing a full color organic electroluminescence device are provided to achieve improved thermal stability and allow for ease of handling, while reducing costs. CONSTITUTION: A method for manufacturing a shadow mask(10), comprises a step(P10) of patterning a photosensitizer on a silicon wafer; a step(P20) of etching the upper surface of the wafer by using a potassium hydroxide solution; and a step(P30) of etching the lower surface of the wafer by using a reaction ion etching device. A method for manufacturing a full color organic electroluminescence device, comprises a step of forming a first electrode on a substrate; a step of forming barrier ribs on the first electrode; a step of fixing a shadow mask on the substrate; a step of sequentially forming red, green, and blue organic electroluminescence layers in the pixel area of the substrate; a step of removing the shadow mask, and forming a second electrode; and a step of encapsulating the resultant structure.
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