发明名称 Modified contact for programmable devices
摘要 In an aspect, an apparatus is provided that sets and reprograms the state of programmable devices. In an aspect, a method is provided such that an opening is formed through a dielectric exposing a contact formed on a substrate. The resistivity of the contact is modified by at least one of implanting ions into the contact, depositing a material on the contact, and treating the contact with plasma. In an aspect, a spacer is formed within the opening and programmable material is formed within the opening and on the modified contact. A conductor is formed on the programmable material and the contact transmits to a signal line.
申请公布号 US6774388(B2) 申请公布日期 2004.08.10
申请号 US20020310603 申请日期 2002.12.05
申请人 OVONYX, INC. 发明人 HUDGENS STEPHEN J.;LOWREY TYLER A.
分类号 H01L23/525;H01L45/00;(IPC1-7):H01L47/00;G11C19/08;G11C5/02 主分类号 H01L23/525
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