| 摘要 |
FIELD: machine engineering, namely precise positioning devices, possibly used in precise machine tools, high accuracy copying devices, in electronic and other industry branches and other, mainly for discrete positioning of object in nanometer range with possibility of common motion of object. ^ SUBSTANCE: apparatus includes basic member supporting with possibility of reciprocation motion relative to basic member rough positioning stage. The last supports stage for precise positioning having setting member and mounted with possibility of reciprocation motion relative to rough positioning stage. Rough positioning stage is connected through kinematic connection with basic member and with precise positioning stage with possibility of motion of both stages relative to basic member. Kinematic connection of said stages is realized with possibility of autonomous motion of setting member of precise positioning stage relative to rough positioning stage and basic member respectively. Precise and rough positioning stages are mounted with possibility of motions along two coordinate axes. Rough positioning stage is in the form of rigid bearing plate onto which framework is fixed. Inside said framework setting member of precise positioning stage is mounted with possibility of motion and fixation in preset position by means of positioning nanometer-range members arranged in pairs at each side of said framework. Rough positioning stage provides predetermined motion with errors less than motion range of precise positioning stage along each of two coordinate axes. Invention provides discrete positioning of object moving by preset distance in nanometer range. ^ EFFECT: enhanced reliability of measurement results at testing position measuring, enlarged operational possibilities of device. ^ 8 cl, 2 dwg |
