发明名称 POLISHING SHEET CAPABLE OF CHECKING EASILY REPLACEMENT PERIOD AND UTILIZING METHOD THEREOF
摘要 PURPOSE: A polishing sheet and a utilizing method thereof are provided to check easily replacement period by using color polishing fabrics. CONSTITUTION: A polishing fabric layer(4) is attached on a polishing wheel(5). A color polishing-fabric layer(6) is coated on the polishing fabric layer. Abrasive suspensions(1) are coated on the color polishing-fabric layer. The material of the color polishing-fabric layer is the same as that of the polishing fabric layer. The abrasive suspensions contain diamond paste and aluminium powder.
申请公布号 KR20040069799(A) 申请公布日期 2004.08.06
申请号 KR20030006341 申请日期 2003.01.30
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 KIM, SEON JU
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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