发明名称 |
POLISHING SHEET CAPABLE OF CHECKING EASILY REPLACEMENT PERIOD AND UTILIZING METHOD THEREOF |
摘要 |
PURPOSE: A polishing sheet and a utilizing method thereof are provided to check easily replacement period by using color polishing fabrics. CONSTITUTION: A polishing fabric layer(4) is attached on a polishing wheel(5). A color polishing-fabric layer(6) is coated on the polishing fabric layer. Abrasive suspensions(1) are coated on the color polishing-fabric layer. The material of the color polishing-fabric layer is the same as that of the polishing fabric layer. The abrasive suspensions contain diamond paste and aluminium powder.
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申请公布号 |
KR20040069799(A) |
申请公布日期 |
2004.08.06 |
申请号 |
KR20030006341 |
申请日期 |
2003.01.30 |
申请人 |
ANAM SEMICONDUCTOR., LTD. |
发明人 |
KIM, SEON JU |
分类号 |
H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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