ANALYSIS SAMPLE HOLDER FOR ANALYZING SURFACE AND METHOD FOR PREPARING SAMPLE

摘要

PURPOSE: An analysis sample holder for analyzing a surface and a method for preparing a sample are provided to prevent an e-beam charging phenomenon generated when a surface is analyzed by allowing the sample to make contact with a formed emboss protrusion part. CONSTITUTION: An analysis sample holder for analyzing a surface includes an emboss protrusion part(2), and a sample(3). A method for preparing a sample spreads glue at a surface excluding the emboss protrusion part(2) of the sample holder. The sample is stick to the surface such that the sample makes contact with the emboss protrusion part. The sample holder(1) and the protrusion part(2) are made of the same material including aluminum. The sample(3) to be analyzed is grounded between the sample holder(1) and the emboss protrusion part(2).