POD FOR TRANSFERRING SEMICONDUCTOR WAFER

摘要

PURPOSE: A pod for transferring a semiconductor wafer is provided to fix stably a carrier by using a fixing part. CONSTITUTION: A pod(10) includes a cover(11), a door and a fixing part. The door(12) for loading a carrier(20) is installed at an end portion of the cover. The fixing part is used for fixing selectively the first handle(21) of the carrier. The fixing part includes a movable bracket, a locking member and the second handle. The movable bracket(30) is installed between guide rails of the cover. The locking member(32) is connected with the movable bracket to be inserted into the first handle. The second handle(34) for moving the movable bracket is protruded from the movable bracket through a slit(33) of the cover.