COLLECTIVE MULTI-POINT LUMP HOMOGENIZING OPTICAL SYSTEM FOR CHANGING GAUSSIAN POWER DISTRIBUTION BEAM OF HIGH POWER LASER

摘要

PURPOSE: COLLECTIVE MULTI-POINT lump HOMOGENIZING OPTICAL SYSTEM for changing a Gaussian power distribution beam of a high power laser is provided to perform a punching process and a thermal process by irradiating simultaneously uniform beams to plural points of a target. CONSTITUTION: A multipoint lump homogenizing optical system includes a homogenizer diffraction optical element, an aperture mask, a diverging diffraction optical element, and a lens. The homogenizer diffraction optical element(3) is used for converting a laser beam having central higher energy density and peripheral lower energy density into a quasi-uniform power distribution beam represented by a 20th-100th order supergaussian function at a definite focus. The aperture mask(4) is laid at the focus of the homogenizer diffraction optical element and has a window wider than the quasi-uniform homogenized supergaussian beam. The diverging diffraction optical element(5) is used for dividing the homogenized supergaussian beam into a plurality of supergaussian beams. The lens(6) is used for converging the branched supergaussian beams on multipoints defined on an image plane(7) laid at a focus of the lens.