| 摘要 |
PURPOSE: A pallet assembly for a substrate inspection device and the substrate inspection device are provided to supply at least two preliminary chambers within one main chamber, respectively, and to leave debris within a pallet assembly even though a substrate is broken within the chamber, thereby preventing device parts of the chamber from being damaged owing to glass fragments. CONSTITUTION: A substrate inspection device(40) consists of a main chamber(41) for inspecting an electron beam, and preliminary chambers(42). The main chamber(41) includes electron guns(44a) for irradiating an electron beam and secondary electron detectors(44b) for detecting secondary electrons. The preliminary chambers(42) have the first partition walls(46), and are connected to the outside through the partition walls(46). The preliminary chambers(42) have molecular turbo pumps for forcibly ventilating the chambers(42). The second partition walls(43) are located between the main chamber(41) and the preliminary chambers(42).
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