| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electronic component excellent in temperature characteristic and electric characteristic. SOLUTION: The electronic component is provided with a substrate 1, an interdigital transducer (IDT) 2 provided on the upper surface of the substrate 1, and a protective film 4 covering the IDT 2 and having an uneven shape on its top surface. A formula t2≤h is satisfied, where the height from the surface of the substrate 1 contacting the protective film 4 to the top portion of a convex portion 4a of the protective film 4 is t, the height from the surface of the substrate 1 contacting the protective film 4 to the bottom of a concave portion 4b of the protective film 4 is t1, the height (t-t1) from the top of the convex portion 4a of the protective film 4 to the bottom of the concave portion 4b of the protective film 4 is t2, the pitch width per pitch of an uneven shape of the protective film 4 is L, the width of the convex portion 4a of the uneven portion per pitch of the uneven shape of the protective film 4 is L1, the width of the concave portion 4b is L2, the pitch width per pitch of the IDT 2 is p, the width of each electrode finger constituting the IDT 2 is p1, the width between IDTs is p2, and the film thickness of the IDT 2 is h. Meanwhile, L≈p, p1+p2=p, L1+L2=L, L1≤p1, and L2≥p2. COPYRIGHT: (C)2004,JPO&NCIPI
|
