| 摘要 |
A direct-write method and apparatus for depositing a functional material with a preferred orientation onto a target surface. The method comprises the following steps: (1) forming a precursor fluid to the functional material, with the fluid containing a liquid component; (2) operating a dispensing device to discharge and deposit the precursor fluid onto the target surface in a substantially point-by-point manner and at least partially removing the liquid component from the deposited fluid to form a thin layer of the functional material which is substantially solidified and is of a predetermined pattern; and (3) during the liquid-removing step, subjecting the deposited fluid to a highly localized electric or magnetic field for poling until a preferred orientation is attained in the deposited functional material. The invention also provides a freeform fabrication method for building a multi-layer device, such as a micro-electro-mechanical system (MEMS), which contains sensor and actuator elements that exhibits piezoelectric, pyroelectric, ferromagnetic, electro-optic and/or other functional properties.
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