| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method in which physical and thermal damages of a work are minimized, and losses of a material during the machining are reduced. <P>SOLUTION: The laser beam machining apparatus comprises a laser beam source 20, an ingot holding unit 12 to hold an ingot 10, a laser beam irradiation member 34 to irradiate laser beams from the laser beam source 20 on a portion to be machined of the ingot 10 held by the ingot holding unit 12, a motor 46 to relatively move the laser beam irradiation member 34 and the ingot 10, and a slider 38 to adjust the distance between the laser beam irradiation member 34 and the portion to be machined of the ingot 10. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
