| 摘要 |
PROBLEM TO BE SOLVED: To provide a real time spectral image analyzer, and an analyzing method capable of concurrently measuring two-dimensional positional information and wavelength information of a sample on a real time basis as a spectral image. SOLUTION: The real time spectral image analyzer is provided with a movable stage 1 carrying the sample S, a light source 2 irradiating white light on a surface of the sample S, a spectroscope 4 making a spectral diffraction at once of an area on one line of reflected light of the white light from the surface of the sample S, a black-and-white CCD camera 5 taking in a spectrum from the spectral diffraction of the reflected light made by the spectroscope 4 as one-dimensional positional information and wavelength information in one frame, and a computer 6 storing, analyzing, and image-processing the one-dimensional positional information and wavelength information taken in by the black-and-white CCD camera 5, and uniaxially operating the movable stage 1 in frame units of the black-and-white CCD camera 5. COPYRIGHT: (C)2004,JPO&NCIPI
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