发明名称 |
Reversible photobleachable materials based on nano-sized semiconductor particles and their optical applications |
摘要 |
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.
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申请公布号 |
US2004152011(A1) |
申请公布日期 |
2004.08.05 |
申请号 |
US20030730382 |
申请日期 |
2003.12.09 |
申请人 |
PIXELLIGENT TECHNOLOGIES LLC |
发明人 |
CHEN ZHIYUN;FLEET ERIN F.;GONEN SERPIL;COOPER GREGORY D. |
分类号 |
G02F1/01;G02F1/015;G02F1/017;G02F1/03;G03F7/00;G03F7/20;H01L;(IPC1-7):G03F7/00 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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