| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a correction drawing method which improves overlap accuracy in a lap drawing. <P>SOLUTION: The correction drawing method comprises lap drawing an above ground pattern by superposing an array position of a drawn under ground pattern within a substrate plane and a pattern design position on one screen and determining the amount of deviation by using an inspection apparatus for making measurement or a drawing system of the same stage as the actual lap drawing, dividing a pattern data area into at least two or more divisions by one correction value or≥2 correction values, and selecting either method of calculating the amount of position correction of the coordinates within the substrate plane and correcting the pattern position for every divided pattern data area in correcting the pattern position by the amount of position correction. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
