发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which can be made very reliable and reduce the power consumption. <P>SOLUTION: The semiconductor device includes an element isolation region 19 formed in a semiconductor substrate 10, and has a relation that X and Y satisfy formula, X/Y=1.33 to 1.67, provided that the depth of the element isolation region 19 is represented by X, and the width of the isolation region 19 isolating adjacent impurity layers 12f and 12h from each other is represented by Y. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004221484(A) 申请公布日期 2004.08.05
申请号 JP20030009933 申请日期 2003.01.17
申请人 SEIKO EPSON CORP 发明人 TANIGUCHI YOSHIHIRO
分类号 H01L21/76;H01L21/762;H01L21/8234;H01L21/8244;H01L27/08;H01L27/11 主分类号 H01L21/76
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