| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation thermometer which has a condensing section, whose visual field is narrow and consequently prevents incidence of stray light, and performs measurement without being influenced, even if the condensing section is marred or foreign matters adhere to it. SOLUTION: Light radiated from a susceptor 4 is condensed by an optical fiber rod 11, and the intensity of the condensed radiation light is reduced to the temperature of the susceptor. The fiber rod 11 is composed of a center core 12 and a surrounding clad 13. In a part of the surface of the clad 13, a light-emitting layer 15, made of a material having a refractive index which is larger than the refractive index of the clad 13, is formed. COPYRIGHT: (C)2004,JPO&NCIPI
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