STORAGE ASSEMBLY FOR WAFERS

摘要

A storage assembly has a magazine which is provided with compartments arranged at different heights for receiving cassettes. Each compartment has a base plate provided with means for establishing a predetermined position of the cassettes. A device for placing cassettes in the compartments is height adjustable, positionable in a horizontal plane and provided with a head for gripping the cassettes. The head of the device includes sensor means for determining a vertical position with respect to the magazine as well as a horizontal position thereof. Reference means interact with the sensor means for determining the horizontal position and are arranged in each of the compartments of the magazine.