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发明名称
Scanning electron microscope
摘要
申请公布号
EP1244132(B1)
申请公布日期
2004.08.04
申请号
EP20020006070
申请日期
1994.12.15
申请人
HITACHI, LTD.
发明人
SATO, MITSUGU;OSE, YOICHI;FUKUHARA, SATORU;TODOKORO, HIDEO;EZUMI, MAKOTO
分类号
H01J37/22;H01J37/05;H01J37/244;H01J37/28;(IPC1-7):H01J37/05
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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