发明名称 Motion picture output from electron microscope
摘要 An apparatus for recording a series of images of a sample over a period of time while varying at least one image parameter. An electron microscope captures images of the sample and also varies the at least one image parameter. A controller triggers the electron microscope to sense multiple images of the sample and also controls the electron microscope to vary the at least one image parameter. An image recorder receives the sensed multiple images and also stores the sensed multiple images as the series of images. A display unit displays the series of images.
申请公布号 US6770879(B1) 申请公布日期 2004.08.03
申请号 US20030386815 申请日期 2003.03.12
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION 发明人 AZORDEGAN AMIR;BEVIS CHRISTOPHER;MARATHE BHARAT;BAKKER DAVID R.
分类号 G01Q30/02;G01Q30/04;H01J37/22;H01J37/28;(IPC1-7):H01J37/256 主分类号 G01Q30/02
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