发明名称 beta-substituted organosilsesquioxane polymers
摘要 Silsesquioxane polymers that are useful for preparing SiO2-rich ceramic coatings are obtained as the polymeric reaction products from the hydrolysis and condensation of organosilanes having a beta-substituted alkyl group. A preferred silsesquioxane polymer is the polymeric reaction product obtained from beta-chloroethyltrichlorosilane. More preferred silsesquioxones are those with non-halogenated alkyl groups, such as the beta-acetoxyethyl- and beta-hydroxyethyl-silsesquioxones. Coating compositions containing such silsesquioxane polymers dissolved in organic solvent may be applied to a substrate and converted to SiO2-rich ceramic thin layers by evaporating the solvent and heating the coated substrate at moderate temperatures.
申请公布号 US6770726(B1) 申请公布日期 2004.08.03
申请号 US19980221554 申请日期 1998.12.28
申请人 GELEST, INC.;UNIVERSITY OF PENNSYLVANIA 发明人 ARKLES BARRY C.;BERRY DONALD H.
分类号 C08G77/04;C08G77/24;C09D183/08;C23C18/12;H01L21/312;(IPC1-7):C08G77/24 主分类号 C08G77/04
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