发明名称 |
beta-substituted organosilsesquioxane polymers |
摘要 |
Silsesquioxane polymers that are useful for preparing SiO2-rich ceramic coatings are obtained as the polymeric reaction products from the hydrolysis and condensation of organosilanes having a beta-substituted alkyl group. A preferred silsesquioxane polymer is the polymeric reaction product obtained from beta-chloroethyltrichlorosilane. More preferred silsesquioxones are those with non-halogenated alkyl groups, such as the beta-acetoxyethyl- and beta-hydroxyethyl-silsesquioxones. Coating compositions containing such silsesquioxane polymers dissolved in organic solvent may be applied to a substrate and converted to SiO2-rich ceramic thin layers by evaporating the solvent and heating the coated substrate at moderate temperatures.
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申请公布号 |
US6770726(B1) |
申请公布日期 |
2004.08.03 |
申请号 |
US19980221554 |
申请日期 |
1998.12.28 |
申请人 |
GELEST, INC.;UNIVERSITY OF PENNSYLVANIA |
发明人 |
ARKLES BARRY C.;BERRY DONALD H. |
分类号 |
C08G77/04;C08G77/24;C09D183/08;C23C18/12;H01L21/312;(IPC1-7):C08G77/24 |
主分类号 |
C08G77/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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