发明名称 |
Apparatus for producing a flux of charge carriers |
摘要 |
Apparatus for producing a flux of charge carriers that may be used in many applications including imaging and lithography comprises an electron source which includes an emitter with a tip radius of about one nanometer and a closely configured extractor, together with a specimen for receiving an electron beam from the source. The apparatus may operate in air under atmospheric conditions and at a much reduced operating voltage.
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申请公布号 |
US6771012(B2) |
申请公布日期 |
2004.08.03 |
申请号 |
US20010802975 |
申请日期 |
2001.03.12 |
申请人 |
HITACHI EUROPE, LTD. |
发明人 |
AHMED HAROON;HASKO DAVID;DRISKILL-SMITH ALEX;WILLIAMS DAVID ARFON |
分类号 |
G01Q10/00;G01Q70/08;H01J37/073;(IPC1-7):H01J37/73 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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