| 摘要 |
PURPOSE: A substrate processing apparatus transmitting power using a non-contact method and a display device manufactured using the apparatus are provided to supply power to a driving axis without extending the driving axis to a space outside the substrate processing apparatus. CONSTITUTION: A substrate processing apparatus(10) includes a substrate processor, a plurality of driving axes, and a power transmitter(100). The substrate processor carries out a predetermined process on a substrate. The driving axes are arranged inside the substrate processor, and support and transfer the substrate. The power transmitter transmits the driving axes to rotate the driving axes. The power transmitter includes a motor(140) for providing power for rotating the driving axes, and a non-contact transmission part(130) for transmitting the power from the outside of the substrate processor to the inside of the substrate processor. The non-contact transmission part includes a pair of conductors(132,134).
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