| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of easily connecting a heating element and a power source. SOLUTION: The ceramic heater has heating elements formed on a plate-shaped body made of ceramics of nitride or carbide and a terminal pin is fixed to respective heating elements. A surface opposite to the surface on which the heating elements are formed is applied as a semiconductor wafer heating surface, and the terminal pin is fixed through a solder. The ceramic heater is made thin and light, and practical. The ceramic heater is excellent in temperature following property against the change of voltage and current, and easy to control the temperature because it is made thin by using nitride ceramics or carbide ceramics as the plate-shaped body. As the terminal pin is fixed on the surface of the heating element, it is easy to connect the heating element with the power source. COPYRIGHT: (C)2004,JPO&NCIPI
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