MEASURING 3D DEFORMATIONS OF AN OBJECT BY COMPARING FOCUSING CONDITIONS FOR SHARP CAPTURING OF SAID OBJECT BEFORE AND AFTER DEFORMATION

摘要

An image analysis apparatus comprises a microscope (102) arranged to capture an image of a sample (122), a processor unit (114) arranged to process the image and a drive mechanism (108). The drive mechanism (108) varies the distance between the sample (122) and the microscope (102) along the optical axis of the microscope (102). The microscope (102) is arranged to capture a plurality of images (402a-404c) of the sample (122) at a plurality of focal planes (distances), along the optical axis. This is done for the sample in a first state and for the sample being in a second state ( e.g. before and after deformation of the object). The processor unit (114) is arranged to divide each of the plurality of captured images (402a-404c) into a plurality of sub-images and select one of each of the plurality of sub-images having the best focus characteristics. Both sets of sub-images are compared to determine in-plane and out-of-plane deformations.