Halbleitersubstrat mit einem optoelektronischen Bauelement und einem optischen Wellenleiter

摘要

An optical assembly structure is disclosed, wherein a semiconductor element (2) generating a large amount of heat and a high impedance optical element (3) can be mounted with low optical loss on the same semiconductor substrate (10) having an optical waveguide (1) formed thereon.The element (2) generating a large amount of heat is mounted on a terrace (11) of the semiconductor substrate (10) directly or through an insulating layer having a thickness of submicron order, while the high impedance element (3) is mounted in a groove which is etched into the semiconductor substrate (10) to such an extent that the optical axis of the high impedance element (3) mates with the optical axis of the optical waveguide layer (1) formed on a recess in the semiconductor substrate (10). The optical axes can be adjusted independently for the respective elements (2, 3). Alternatively, with a potential on the semiconductor substrate (10) set equal to a supply voltage or a ground potential, a crystal substrate (20) for a forwardly biased heat generating element (2) is given the polarity opposite to that of a crystal substrate (30) for a reversely biased element (3) which may imply a problem of stray capacitance.