| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device for an optical disk master disk, by which the irregularity of a pitch is reduced when a resist plate is concentric-circularly or spirally exposed. SOLUTION: This exposure device for the optical disk master disk is constituted so that the resist plate 13 mounted on the turntable 8 arranged in a vacuum chamber 11 is irradiated by electron beams to expose the resist plate 13, and a position detecting mirror face 81 inclined by 45°with respect to the outer peripheral side surface is formed over the whole circumference of the outer peripheral side surface of the turntable 8. COPYRIGHT: (C)2004,JPO&NCIPI
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