RECESSED MICROSTRUCTURE DEVICE AND FABRICATION METHOD THEREOF

摘要

The present invention provides a micro-electro-mechanical device with a recessed micromechanical structure and to a method of fabrication thereof. The present invention also provides silicon wafers provided with recessed micromechanical structures, which are useful in the field of micro-electro-mechanical systems. The present invention also provides a method for fabrication of micro-electro-mechanical device using micromachining techniques.