ELECTRODE STRUCTURE FOR CRYSTAL RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide an electrode structure for a crystal resonator whose vibration characteristic is excellently maintained by suppressing increase in a conduction resistance due to heat processing after a crystal chip is contained in a package and the package is sealed with a cover. SOLUTION: In the electrode structure for the crystal resonator formed by layering an Au made conduction electrode on a background electrode of an exciting electrode and a lead-out electrode provided to a principal face of the crystal chip, the electrode structure adopts the Ti made background electrode. Then the electrode film thickness of Au used for the conduction electrode is selected to be 400 to 800Åfor the electrode structure. COPYRIGHT: (C)2004,JPO&NCIPI