Linear drive for optical equipment used in semiconductor manufacture, includes piezoelectric actuator sections operating longitudinally and in shear with anisotropic connection

摘要

The actuator stacks are supported on carriers (12, 13) and have sections (15, 16) operating longitudinally and in shear. Their drive is stepped, to alternately clamp, move and release a runner (7) in sequence, causing controlled motion. Between the shear actuator (16) and longitudinal actuator (15) of a stack, there is a connector (18). This is soft in the longitudinal direction of the actuator sections, but rigid in the direction of motion of the runner.