| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the attaching/detaching of a stage member, and at the same time, to increase the durability of the stage member to the attaching/detaching, and certainty of the attaching/detaching work. SOLUTION: The stage member 140 has an engaging claw 146 which is arranged at a lower part on the front surface, and an engaging protrusion 145 which is arranged on the rear surface part 144. A base frame 102 has an engaging hole 102d which is arranged on the bottom surface part 102c and an engaging recess 102b which is arranged on the back surface part 102a. The stage member 140 is turned while the engaging claw 146 is engaged with the engaging hole 102d. By elastically deforming the back surface part 102a by pressing the back surface part 102a by the engaging protrusion 145 when the stage member 140 is turned, the engaging protrusion 145 is engaged with the engaging recess 102b. COPYRIGHT: (C)2004,JPO&NCIPI
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