发明名称 |
Micro-fabricated device and method of making |
摘要 |
A micro-fabricated device, includes a support structure and a device substrate disposed a distance G from the support structure. The micro-fabricated device further includes one or more thermally isolating structures that have a characteristic length, and the one or more thermally isolating structures is thermally coupled to the device substrate and the support structure. The characteristic length is greater than said distance G.
|
申请公布号 |
US2004147056(A1) |
申请公布日期 |
2004.07.29 |
申请号 |
US20030353332 |
申请日期 |
2003.01.29 |
申请人 |
MCKINNELL JAMES C.;LIEBESKIND JOHN;CHEN CHIEN-HUA |
发明人 |
MCKINNELL JAMES C.;LIEBESKIND JOHN;CHEN CHIEN-HUA |
分类号 |
B81B1/00;B81B3/00;B81B7/00;B81C1/00;G11B9/10;H01L21/00;H01L23/00;(IPC1-7):H01L21/00 |
主分类号 |
B81B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|