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发明名称
Anwendung von dünnen kristallinen Si3N4-Strukturen in Flachgräbenisolationsstrukturen
摘要
申请公布号
DE69632768(D1)
申请公布日期
2004.07.29
申请号
DE1996632768
申请日期
1996.09.04
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK;INFINEON TECHNOLOGIES AG
发明人
HO, HERBERT;HAMMERL, ERWIN;DOBUZINSKY, DAVID M.;PALM, J. HERBERT;FUGARDI, STEPHEN;AJMERA, ATUL;MOSEMAN, JAMES E.;RAMAC, SAMUEL C.
分类号
H01L21/76;H01L21/3105;H01L21/318;H01L21/32;H01L21/762;(IPC1-7):H01L21/763;H01L21/334
主分类号
H01L21/76
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代理人
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