Reactor for diamond synthesis assisted by microwave plasma has system for forcing and depositing diamond germination species on inner walls of holes in wire drawing dies

摘要

The reactor for diamond synthesis assisted by microwave plasma for depositing a diamond layer on a surface incorporates a system for forcing the species responsible for diamond germination through holes in one or more wire drawing dies so that they deposit the diamond material on the holes' inner walls. The species enter the reactor through an upper inlet (5) in a chamber where a plasma ball is formed over a substrate (3) of nuclear quality graphite supporting a wire drawing die (8). The reactor has a copper tube (4) passing vertically through the center of its sole plate (2) to allow gases to be pumped just under the substrate.