| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic control electrode capable of facilitating accurate electrode mounting; and to provide its manufacturing method. SOLUTION: Since a signal modulation electrode 24 or the like is formed of a thick film sheet member composed by respectively stacking a plurality of strip-like thick film conductors 48a and 48b on both surfaces of a support dielectric layer 42 or the like, and provided with electron passing holes 34 or the like penetrating them, a plurality of the strip-like thick film conductors 48 capable of functioning as mutually independent electrodes can be formed only by fixing the single thick film sheet member at a predetermined position, so that the electrodes can extremely easily be installed, and relative position accuracy can be provided. Although a conductor is not installed on the inside surface of an intermediate part in the electron passing direction of each passing hole 34, since the thick film conductors on both the surfaces stacked through the thin dielectric layer 42 or the like project toward the inner side than the dielectric layer 42 or the like and are positioned in the same surface direction position, electric fields formed by them are integrated and they substantially function as a single electrode, so that no inconvenience is created. COPYRIGHT: (C)2004,JPO&NCIPI
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