VERTICAL MEMS GYROSCOPE OF HORIZONTAL VIBRATION AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a vertical MEMS gyroscope and its manufacturing method, capable of shortening a process step and improving in reliability.

SOLUTION: The vertical MEMS gyroscope is composed of a substrate 300; a pedestal 310 fixed on a face of the substrate; a driving structure 320 fixed on the pedestal and floating, in parallel with the substrate and its either region is capable of vibrating in a prescribed direction; a detection structure 330 fixed to the driving structure and arranged on the same surface as the driving structure; a capping wafer 350 arranged on the driving structure and the detection structure, and connected with the substrate; and a vertical displacement detecting fixed electrode 334a formed in a prescribed region of lower part of the cap wafer, for measuring the displacement of the detecting structure in the vertical directions.

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