PLANER ELECTROMAGNETIC ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a very small planer electromagnetic actuator by downsizing the outside dimensions. SOLUTION: The planer electromagnetic actuator is composed so that a movable plate 22 and a pair of torsion bars 23 and 24 which support oscillatably journal the movable plate 22 are formed in a unit on a silicon substrate, a permanent magnet 25 which has yokes 26 and 27 on the pole faces is so arranged in the normal direction of the movable plate 22 of a planer electromagnetic actuator chip 21 which is provided with a flat plane coil on a face of the movable plate 22 and a mirror on the other face that the permanent magnet 25 generates an external magnetic field which is normal to the axial direction of the torsion bars 23 and 24 and in parallel to the movable plate. COPYRIGHT: (C)2004,JPO&NCIPI