| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact and clean method and device for orienting a liquid crystal alignment layer as an alternative to the conventionally utilized rubbing method. SOLUTION: A substrate on which the alignment layer is formed with coating and baking is set on a substrate stage. Surrounding atmosphere of the substrate and an ion beam irradiation source is turned into vacuum. Ar gas is flown, is ionized and is made to irradiate the substrate. A cross section of the ion beam is made to have a diameter to uniformly irradiating the total area of the surface of the liquid crystal alignment layer on the substrate. After the ion beam irradiation is finished for one of the substrates, the substrate stage is automatically revolved and the next substrate is set on a position to be irradiated with the ion beam so as to make a continuous ion beam irradiation process feasible. COPYRIGHT: (C)2004,JPO&NCIPI
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