| 摘要 |
PROBLEM TO BE SOLVED: To perform carrying of a workpiece at a short cycle time using a carrying apparatus having a simple mechanism. SOLUTION: The workpiece carrying apparatus comprises: a workpiece arranging table 10 having a workpiece arranging surface 11, on which a workpiece W1 to be carried is arranged; a workpiece receiving table 20 having a workpiece receiving surface 21 for receiving the carried workpiece; a chuck 6 for holding the workpiece located on the workpiece arranging surface 11 and for releasing the workpiece at the workpiece receiving stand; and horizontal chuck moving apparatuses 1, 2 for moving the chuck in the horizontal direction. COPYRIGHT: (C)2004,JPO&NCIPI
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