发明名称 METHOD AND APPARATUS FOR MANUFACTURING OPTICAL FIBER PREFORM
摘要 PROBLEM TO BE SOLVED: To provide a method and apparatus for forming an optical fiber preform in which the additive density is uniform and which has high reliability by depositing a high quality glass film. SOLUTION: In the method for manufacturing the optical fiber preform, including a process for depositing a glass film on the inner surface of a glass tube 100 by a plasma-induced CVD method comprising forming a plasma region (PR) in the glass tube 100 and reciprocating the glass tube relatively to the plasma region, the film is deposited while confining the plasma by impressing a magnetic field to the plasma region. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004203682(A) 申请公布日期 2004.07.22
申请号 JP20020375625 申请日期 2002.12.25
申请人 SUMITOMO ELECTRIC IND LTD 发明人 SOMA KAZUYUKI;ONISHI MASASHI;HATTORI TETSUYA;SEMURA SHIGERU
分类号 C03B37/018;C23C16/511;(IPC1-7):C03B37/018 主分类号 C03B37/018
代理机构 代理人
主权项
地址