发明名称 |
METHOD AND APPARATUS FOR MANUFACTURING OPTICAL FIBER PREFORM |
摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for forming an optical fiber preform in which the additive density is uniform and which has high reliability by depositing a high quality glass film. SOLUTION: In the method for manufacturing the optical fiber preform, including a process for depositing a glass film on the inner surface of a glass tube 100 by a plasma-induced CVD method comprising forming a plasma region (PR) in the glass tube 100 and reciprocating the glass tube relatively to the plasma region, the film is deposited while confining the plasma by impressing a magnetic field to the plasma region. COPYRIGHT: (C)2004,JPO&NCIPI
|
申请公布号 |
JP2004203682(A) |
申请公布日期 |
2004.07.22 |
申请号 |
JP20020375625 |
申请日期 |
2002.12.25 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
SOMA KAZUYUKI;ONISHI MASASHI;HATTORI TETSUYA;SEMURA SHIGERU |
分类号 |
C03B37/018;C23C16/511;(IPC1-7):C03B37/018 |
主分类号 |
C03B37/018 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|