IMPROVED ALN MATERIAL AND ELECTROSTATIC CHUCK INCORPORATING SAME

摘要

An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio rho_10V/rho_500V less than about 5. In this regard, rho_10V represents the resistivity of the electrostatic chuck at 10 applied volts while rho_500V represents the resistivity of the AlN material at 500 applied volts.