SHAPE MEASURING METHOD OF POLISHING PAD, POLISHING METHOD OF WORKPIECE AND SHAPE MEASURING DEVICE FOR POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To provide a shape measuring method of a polishing pad and a measuring device for highly accurately and highly reliably measuring a polishing pad surface shape by measuring the surface shape of the polishing pad under a condition close to a state of polishing a workpiece.

SOLUTION: This shape measuring method of polishing pad measures the surface shape of a polishing pad 2 stuck to a polishing surface plate 1 by using a displacement measuring means 3, and applies vertical stress by contacting the displacement measuring means 3 with the polishing pad 2, and measures the surface shape of the polishing pad while relatively moving the polishing surface plate 1 and the displacement measuring means 3 by rotating the polishing surface plate 1 and/or the displacement measuring means 3.

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