| 摘要 |
PROBLEM TO BE SOLVED: To surely and easily perform characteristics adjustment of a device in a short time without damaging the substrate of a device or a circuit pattern. SOLUTION: The characteristics adjusting apparatus comprises a vacuum vessel 11 which houses a superconducting band pass filter 10 and acts as a housing means for realizing a vacuum state, a refrigerator 12 which is a cooling means for cooling the superconducting band pass filter 10, a network analyzer 13 of a measuring means for measuring the electric characteristics of the superconducting band pass filter 10, an ion beam source 14 which is arranged above the vacuum vessel 11 and irradiates a circuit pattern 10a of the superconducting band path filter 10 with an argon ion, and a controller 15 of a control means for controlling the operation of the network analyzer 13 and the ion beam source 14. COPYRIGHT: (C)2004,JPO&NCIPI |
