MULTILAYER STRUCTURE, ITS MANUFACTURING METHOD, FUNCTIONAL STRUCTURE, ITS MANUFACTURING METHOD, ELECTRON-BEAM EXPOSURE MASK, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To manufacture various types of functional structures including a micro-mirror inexpensively and accurately in a simple and convenient manner.

SOLUTION: A multi-layer structure is manufactured by cold bonding first and second layers 2 and 3, at least one of which is made of single crystalline material via a metallic film 1 such as an Al film containing one or more sorts of metals. The first and second layers both can be made of the single crystalline material or made of mutually different materials. The first and second layers are each, for example, a single crystalline Si layer or a single crystalline Si substrate. The multi-layer structure is used, e.g., to manufacture the micro-mirror.

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